Microelecrtomechanical systems (MEMS) are not very big devices which are joined with semiconductor devices and which combine characteristics of circuits and mechanical components.
Different types of MEMS demand parameters control in terms of various physical, temperature effects and other conditions that define functionality of equipment. Usually to achieve reliable and accurate equipment inspection there are required careful choice, design and each subsystem component’s integration including measuring equipment, device for mechanical effect, testing adaptor, equipment for temperature modes alignment and software as well.
Using its own development Measuring complex for functional control FT-17 as test equipment, Sovtest ATE, Ltd develops and supplies ready-made MEMS testing solutions both for short-series manufacturing (semi-automated) and full-automated systems for inspection of large production.
Solution for short-series manufacturing.
Semi-automated (minimum operator’s participating) solution for short-series manufacturing includes:
- measuring equipment (in this case it is measuring complex for functional control FT-17);
- testing adaptor with contact devices for installation of one or more tested objects;
- equipment for alignment physical effects on tested object.
Testing adaptor is installed on the equipment for alignment physical effects and with the help of cable set is connected with measuring system. All the system components are connected by one program environment which task is to control test process, to align conditions, to measure output signals, to collect statistics, etc.
The equipment for alignment of physical effects can be both stands for imitation of a single effect and complicated multi-component stands as well.
Solution examples.
- Testing of accelerometers MEMS parameters
Used to control accelerometers MEMS parameters at manufacturing and input control.
Parameters under control:
- MEMS transformation coefficient;
- transformation coefficient instability in terms of temperature changing;
- linearity of transformation coefficient;
- MEMS current consumption;
- zero offset value and instability zero offset;
- MEMS dynamical characteristics (pass band).
The system construction:
- Calibrating vibration table TV 51140-C (Tira)
- Portable research system TP04300A (Temptronic)
- Measuring complex for functional control FT-17
Main characteristics:
- max preset speed-up – up to 68 g;
- range of preset frequency by vibrating system – between 40 Hz and 25 kHz;
- expulsive force – 400 N;
- range of temperatures set up by term system – between - 80°C and +225°C
- temperature changing speed - from 55°С to +125°С - 5 sec.
- voltage supply on MEMS under tests – от 30 V, 5 А
- scan of input characteristics of tested MEMS – by means of oscillograph with pass band 70 MHz;
- simultaneous measurements – max. 64 channels.
Metrological support.
It is included in State register measuring equipment (certificate for measuring equipment of military purposes type confirmation).
II.Testing of gyroscope and angle transmitter MEMS parameters.
The equipment is used to control MEMS parameters of gyroscopes, angle transmitters, tilt sensors and angular speed at manufacturing and input control. It can be used for calibrating MEMS accelerometers.
Parameters under control:
- MEMS transformation coefficient;
- transformation coefficient instability in terms of temperature changing;;
- linearity of transformation coefficient;
- MEMS current consumption;
- zero offset value and instability zero offset;
- MEMS dynamical characteristics (pass band).
System construction:
- Double-axis stand for alignment of physical effects
- Temperature chamber
- Measuring complex for functional control FT-17
Main characteristics:
- range of preset angular speed – ±1500 °/c (for internal axle);
- range of preset angle – ±360 ° (for internal axle), 0…90 ° (for external axle);
- accuracy of preset angular values – ±0,0005 °;
- range of temperatures set up by term system – between - 60°C and +125°C
- temperature measuring speed - 4 °/sec.
- voltage supply on MEMS under tests – min. 30 V, 5 А
- scan of input characteristics of tested MEMS – by means of oscillograph with pass band 70 MHz;
- simultaneous measurements – max. 64 channels.
Metrological support.
It is included in State register measuring equipment (certificate for measuring equipment of military purposes type confirmation).
The mentioned above Measuring complex can effectively interacts with the equipment listed below: